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1 Chapter 2Table 2.1. Micrographs of texturing for different concentrations (100%, 50%, and...Table 2.2. Requirements and advantages of the candidates to substitute IPA.

2 Chapter 4Table 4.1. Detection and quantification limits calculated according to [66] of t...Table 4.2. DOE for the cleaning of textured wafers (slurry/diamond wire sawed).

3 Chapter 5Table 5.1. Semi-quantitative results of a TD-GC-MS analysis of organic surface c...