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This chapter addresses the techniques of data acquisition and preprocessing. For data acquisition, both process data and metrology data have to be collected for developing various intelligent applications. In general, process data consists of sensing signals and manufacturing parameters. As for data preprocessing, the key steps are segmentation, cleaning, and feature extraction. Finally, four practical examples using real‐world data are respectively demonstrated to validate techniques of data acquisition and data preprocessing addressed in this chapter; the detailed experimental data are uploaded in the IEEE DataPort for references.