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Table of Contents
Оглавление1 Cover
7 Preface Overview and Goals Organization and Features
9 Foreword
10 1 Evolution of Automation and Development Strategy of Intelligent Manufacturing with Zero Defects 1.1 Introduction 1.2 Evolution of Automation 1.3 Development Strategy of Intelligent Manufacturing with Zero Defects 1.4 Conclusion Appendix 1.A ‐ Abbreviation List References
11 2 Data Acquisition and Preprocessing 2.1 Introduction 2.2 Data Acquisition 2.3 Data Preprocessing 2.4 Case Studies 2.5 Conclusion Appendix 2.A ‐ Abbreviation List Appendix 2.B ‐ List of Symbols in Equations References
12 3 Communication Standards 3.1 Introduction 3.2 Communication Standards of the Semiconductor Equipment 3.3 Communication Standards of the Industrial Devices and Systems 3.4 Conclusion Appendix 3.A ‐ Abbreviation List References
13 4 Cloud Computing, Internet of Things (IoT), Edge Computing, and Big Data Infrastructure 4.1 Introduction 4.2 Cloud Computing 4.3 IoT and Edge Computing 4.4 Big Data Infrastructure 4.5 Conclusion Appendix 4.A ‐ Abbreviation List Appendix 4.B ‐ Abbreviation List References
14 5 Docker and Kubernetes 5.1 Introduction 5.2 Fundamentals of Docker 5.3 Fundamentals of Kubernetes 5.4 Conclusion Appendix 5.A ‐ Abbreviation List References
15 6 Intelligent Factory Automation (iFA) System Platform 6.1 Introduction 6.2 Architecture Design of the Advanced Manufacturing Cloud of Things (AMCoT) Framework 6.3 Brief Description of the Automatic Virtual Metrology (AVM) Server 6.4 Brief Description of the Baseline Predictive Maintenance (BPM) Scheme in the Intelligent Prediction Maintenance (IPM) Server 6.5 Brief Description of the Key‐variable Search Algorithm (KSA) Scheme in the Intelligent Yield Management (IYM) Server 6.6 The iFA System Platform 6.7 Conclusion Appendix 6.A ‐ Abbreviation List Appendix 6.B ‐ List of Symbols References
16 7 Advanced Manufacturing Cloud of Things (AMCoT) Framework 7.1 Introduction 7.2 Key Components of AMCoT Framework 7.3 Framework Design of Cyber‐Physical Agent (CPA) 7.4 Rapid Construction Scheme of CPAs (RCSCPA) Based on Docker and Kubernetes 7.5 Big Data Analytics Application Platform 7.6 Manufacturing Services Automated Construction Scheme (MSACS) 7.7 Containerized MSACS (MSACSC) 7.8 Conclusion Appendix 7.A ‐ Abbreviation List Appendix 7.B ‐ Patents (AMCoT + CPA) References
17 8 Automatic Virtual Metrology (AVM) 8.1 Introduction 8.2 Evolution of VM and Invention of AVM 8.3 Integrating AVM Functions into the Manufacturing Execution System (MES) 8.4 Applying AVM for Workpiece‐to‐Workpiece (W2W) Control 8.5 AVM System Deployment 8.6 Conclusion Appendix 8.A – Abbreviation List Appendix 8.B – List of Symbols in Equations Appendix 8.C – Patents (AVM) References
18 9 Intelligent Predictive Maintenance (IPM) 9.1 Introduction 9.2 BPM 9.3 Time‐Series‐Prediction (TSP) Algorithm for Calculating RUL 9.4 Factory‐Wide IPM Management Framework 9.5 IPM System Implementation Architecture 9.6 IPM System Deployment 9.7 Conclusion Appendix 9.A ‐ Abbreviation List Appendix 9.B – List of Symbols in Equations Appendix 9.C – Patents (IPM) References
19 10 Intelligent Yield Management (IYM) 10.1 Introduction 10.2 KSA Scheme 10.3 IYM System Deployment 10.4 Conclusion Appendix 10.A ‐ Abbreviation List Appendix 10.B ‐ List of Symbols in Equations Appendix 10.C ‐ Patents (IYM) References
20 11 Application Cases of Intelligent Manufacturing 11.1 Introduction 11.2 Application Case I: Thin Film Transistor Liquid Crystal Display (TFT‐LCD) Industry 11.3 Application Case II: Solar Cell Industry 11.4 Application Case III: Semiconductor Industry 11.5 Application Case IV: Automotive Industry 11.6 Application Case V: Aerospace Industry 11.7 Application Case VI: Chemical Industry 11.8 Application Case VII: Bottle Industry Appendix 11.A ‐ Abbreviation List Appendix 11.B ‐ List of Symbols in Equations References
21 Index
