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This edition first published 2022

Published by John Wiley & Sons, Inc., Hoboken, New Jersey.

Published simultaneously in Canada.

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Library of Congress Cataloging-in-Publication Data

Names: Bardos, Ladislav, 1947- author. | Barankova, Hana, 1951- author.

Title: Microwave plasma sources and methods in processing technology / Ladislav Bardos, Hana Barankova, Uppsala University, Uppsala, Sweden.

Description: Hoboken, New Jersey : John Wiley & Sons, 2022. | Includes bibliographical references and index.

Subjects: LCSH: Electromagnetism.

Classification: LCC QC760 .B267 2022 (print) | LCC QC760 (ebook) | DDC 660/.044--dc23

LC record available at https://lccn.loc.gov/2021031913 LC ebook record available at https://lccn.loc.gov/2021031914

Cover design by Wiley

Set in 9.5/12.5pt STIXTwo Text by Integra Software Services, Pondicherry, India

Microwave Plasma Sources and Methods in Processing Technology

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