Читать книгу Whole-Angle MEMS Gyroscopes - Doruk Senkal, Andrei M. Shkel - Страница 11

Preface

Coriolis Vibratory Gyroscopes (CVGs) can be divided into two broad categories based on the gyroscope's mechanical element: degenerate mode gyroscopes (type 1), which have x–y symmetry, and nondegenerate mode gyroscopes (type 2), which are designed intentionally to be asymmetric in x and y modes.

Currently, nondegenerate mode gyroscopes fulfill the needs of a variety of commercial applications, such as tilt detection, activity tracking, and gaming. However, when it comes to inertial navigation, where sensitivity and stability of the sensors are very important, commercially available MEMS sensors fall short by three orders of magnitude. Degenerate mode gyroscopes, on the other hand, offer a number of unique advantages compared to nondegenerate vibratory rate gyroscopes, including higher rate sensitivity, ability to implement whole‐angle mechanization with mechanically unlimited dynamic range, exceptional scale factor stability, and a potential for self‐calibration. For this reason, as the MEMS gyroscope development is reaching maturity, the Research and Development focus is shifting from high‐volume production of low‐cost nondegenerate mode gyroscopes to high performance degenerate mode gyroscopes. This paradigm shift in MEMS gyroscope research and development creates a need for a reference book to serve both as a guide and an entry point to the field of degenerate mode gyroscopes.

Despite the growing interest in this field, the available information is scattered across a disparate group of conference proceedings and journal papers. For the aspiring scientist/engineer, the scarcity of information forms a large barrier to entry into the field of degenerate mode gyroscopes. This book aims to lower the barrier to entry by providing the reader with a solid understanding of the fundamentals of degenerate mode gyroscopes and its control strategies, as well as providing the necessary know‐how and technical jargon needed to interpret future publications in the field.

The book is intended to be a reference material for researchers, scientists, engineers, and college/graduate students who are interested in inertial sensors. The book may also be of interest to control systems engineers, electrical and electronics engineers, as well as semiconductor engineers who work with inertial sensors. Finally, materials scientists and MEMS production engineers may find the section regarding various fabrication technologies and fabrication defects/energy loss mechanisms interesting.

Doruk Senkal

Andrei M. Shkel