Читать книгу Whole-Angle MEMS Gyroscopes - Doruk Senkal, Andrei M. Shkel - Страница 3

1 List of AbbreviationsTable 1 Control system abbreviations.Table 2 Mechanical parameters of the resonator.

2 Chapter 5Table 5.1 Summary of design parameters.Table 5.2 As‐fabricated frequency symmetry of four devices.Table 5.3 Summary of design parameters.

3 Chapter 7Table 7.1 Comparison of wineglass dimensions obtained from analytical solutio...Table 7.2 Anchor loss analysis shows a large change in for different stem di...Table 7.3 Sample design parameters for micro‐glassblown mushroom structure.Table 7.4 Sample design parameters for micro‐glassblown hemisphere.

4 Chapter 8Table 8.1 Table summarizing frequency splits and center frequency of five dif...Table 8.2 Summary of device parameters for a 7 mm fused silica wineglass reso...