Читать книгу Whole-Angle MEMS Gyroscopes - Doruk Senkal, Andrei M. Shkel - Страница 2

1  Cover

2  List of Abbreviations

3  Preface

4  About the Authors

5  Part I: Fundamentals of Whole‐Angle Gyroscopes 1 Introduction 1.1 Types of Coriolis Vibratory Gyroscopes 1.2 Generalized CVG Errors 1.3 Overview 2 Dynamics 2.1 Introduction to Whole‐Angle Gyroscopes 2.2 Foucault Pendulum Analogy 2.3 Canonical Variables 2.4 Effect of Structural Imperfections 2.5 Challenges of Whole‐Angle Gyroscopes 3 Control Strategies 3.1 Quadrature and Coriolis Duality 3.2 Rate Gyroscope Mechanization 3.3 Whole‐Angle Mechanization 3.4 Conclusions

6  Part II: 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 4 Overview of 2‐D Micro‐Machined Whole‐Angle Gyroscopes 4.1 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 4.2 2‐D Micro‐Machining Processes 5 Example 2‐D Micro‐Machined Whole‐Angle Gyroscopes 5.1 A Distributed Mass MEMS Gyroscope – Toroidal Ring Gyroscope 5.2 A Lumped Mass MEMS Gyroscope – Dual Foucault Pendulum Gyroscope

7  Part III: 3‐D Micro‐Machined Whole‐Angle Gyroscope Architectures 6 Overview of 3‐D Shell Implementations 6.1 Macro‐scale Hemispherical Resonator Gyroscopes 6.2 3‐D Micro‐Shell Fabrication Processes 6.3 Transduction of 3‐D Micro‐Shell Resonators 7 Design and Fabrication of Micro‐glassblown Wineglass Resonators 7.1 Design of Micro‐Glassblown Wineglass Resonators 7.2 An Example Fabrication Process for Micro‐glassblown Wineglass Resonators 7.3 Characterization of Micro‐Glassblown Shells 8 Transduction of Micro‐Glassblown Wineglass Resonators 8.1 Assembled Electrodes 8.2 In‐plane Electrodes 8.3 Fabrication 8.4 Experimental Characterization 8.5 Out‐of‐plane Electrodes 8.6 Design 8.7 Fabrication 8.8 Experimental Characterization 9 Conclusions and Future Trends 9.1 Mechanical Trimming of Structural Imperfections 9.2 Self‐calibration 9.3 Integration and Packaging

8  References

9  Index

10  IEEE Press Series on Sensors

11  End User License Agreement