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3.1.2. Defect species vs sample synthesis methods

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Intrinsic structural defects emerge inevitably in the sample growth within finite time according to the thermodynamic theory. Hong et al. [19] found the primary point defects in monolayer MoS2 changed with the growth methods, physical vapor deposition (PVD) [11, 2022], mechanical exfoliation (ME) [23] and chemical vapor deposition (CVD) [16, 17, 24, 25], as shown in Fig. 3. It is observed that antisite defects MoS2 with Mo replacing the S2 sublattice are the dominant point defects in PVD MoS2, while in ME and CVD monolayers, sulfur vacancies VS are the most common defects. Different atomic growth mechanisms [19] have been outlined to account for the difference in the primary defect species in the different growth methods.

The predominant defects such as antisite MoS2 and MoS in PVD samples are statistically analyzed at a density of (2.8 ± 0.3) × 1013cm−2 and 7.0 × 1012cm−2, corresponding to an atom percent of 0.8% and 0.21%, respectively. The dominant point defect VS vacancy in the CVD samples has a statistical concentration of (1.2 ±0.4) × 1013cm−2. As both concentrations of primary defects (vacancies or antisites) are remarkably high (0.8–0.2%), it is naturally expected that they will considerably tailor the electronic structures [19].


Figure 2. Atomic structures of antisite defects. (a)–(c) High-resolution ADF-STEM images of antisite MoS, MoS2, and Mo2S2, respectively. The former two antisites are dominant in PVD-synthesized MoS2 single layers. Scale bar: 0.5 nm. (d) and (e) Atomic structures of antisite defects SMo and S2Mo, respectively. (f)–(j) Simulated STEM images based on the theoretically relaxed structures of the corresponding point defects in (a)–(e). (k)–(t) Top and side views of DFT-relaxed atomic model of all antisite defects. Light blue: Mo atom; gold: S2 atoms. Reproduced from Jin et al. (2015) with permission.

Defects in Functional Materials

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