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MEMS Tuning Fork Gyroscope
ОглавлениеA design originally developed at the Charles Stark Draper Laboratories in the 1980s and 1990s [5] does not physically resemble a tuning fork, but it uses the same principle of two masses resonating in the plane of their silicon substrate, and in synchrony to maintain zero net momentum. The input rotation axis is in the plane of the substrate, as illustrated in Figure 3.4. Vibratory motion is controlled by electrostatic “comb drives” (interdigitated electrodes) developed at the University of California at Berkeley. The input axis is in the plane of the substrate and the output vibration mode is normal to the substrate surface. Many improvements have been made in this original design. There are also devices using rotational vibrations coupled with Coriolis effects.