| APC | Advanced Process Control |
| ATP | Available‐to‐Promise |
| AVM | Automatic Virtual Metrology |
| BDA | Big Data Analytics |
| CASD | Capacity‐Allocated‐Support Demand |
| CIM | Computer‐Integrated Manufacturing |
| CMfg | Cloud‐based Manufacturing |
| CORBA | Common Object Request Broker Architecture |
| CPS | Cyber‐Physical Systems |
| EC | Engineering Chain |
| ECMS | Engineering‐Chain‐Management System |
| EECs | Equipment Engineering Capabilities |
| EE | Equipment Engineering |
| EES | Equipment Engineering System |
| EPS | Equipment Prognosis System |
| ERP | Enterprise Resource Planning |
| ESCM | Electronic Supply Chain Management |
| FDC | Fault Detection and Classification |
| FOUP | Front Opening Unified Pod |
| FICS | Free Internet Chess Server |
| GEDs | Generic Embedded Devices |
| GEM | Generic Equipment Model |
| GH | Generic Holon |
| GUI | Graphical User Interface |
| HMES | Holonic Manufacturing Execution System |
| HSCS | Holonic Supply‐Chain System |
| HSMS | High‐Speed SECS Message Services |
| IC | Integrated Circuit |
| ICT | Information and Communication Technology |
| iFA | Intelligent Factory Automation |
| IoT | Internet of Things |
| IP | Internet Protocol Address |
| IPM | Intelligent Predictive Maintenance |
| ISMT | International SEMATECH |
| IT | Information Technology |
| ITRS | International Technology Roadmap of Semiconductor |
| IYM | Intelligent Yield Management |
| KSA | Key‐variable Search Algorithm |
| L2L | Lot‐to‐Lot |
| MC | Mass Customization |
| MCS | Material Control System |
| MES | Manufacturing Execution System |
| MP | Mass Production |
| MPS | Master Production Schedule |
| NACFAM | National Coalition for Advanced Manufacturing |
| O2D | Order‐to‐Delivery |
| OEE | Overall Equipment Effectiveness |
| PdM | Predictive Maintenance |
| PO | Purchase Order |
| R2R | Run‐to‐Run |
| RD | Research and Development |
| RDL | Re‐Distribution Layer |
| RM | Recipe Management |
| RUL | Remaining Useful Life |
| SC | Supply Chain |
| SECS | SEMI Equipment Communications Standard |
| SOAP | Simple Object Access Protocol |
| SPC | Statistical Process Control |
| SSL | Secure Sockets Layer |
| T2M | Time‐to‐Market |
| tsmc | Taiwan Semiconductor Manufacturing Company |
| UBM | Under Bump Metallurgy |
| VM | Virtual Metrology |
| W2W | Wafer‐to‐Wafer |
| W2W | Workpiece‐to‐Workpiece |
| WIP | Work in Process |
| WSDL | Web Services Description Language |
| YES | Yield Enhancement System |
| YMS | Yield Management System |
| ZD | Zero Defects |
