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Figure 2.2 illustrates the connection of an equipment and an external data acquisition system with a basic hardware architecture meeting the aforementioned requirements for implementing intelligent applications. The analog‐to‐digital converter (ADC) connects to various sensors installed on the equipment side to convert analog sensing signals into digital signals via its analog input/output (AIO) ports. The external data acquisition system is connected to the controller of the equipment through an Ethernet card for retrieving the manufacturing parameters. The corresponding metrology data by the measurement tool for training and tuning the AI models can also be acquired through the Ethernet card, which interconnects network devices based on the Transmission Control Protocol/Internet Protocol (TCP/IP) protocol. In this way, required process and metrology data are collected and sent to an industrial personal computer (PC) for further processing.

Figure 2.2 An external data acquisition system for acquiring process and metrology data from the equipment and measurement tool.